Badaroglu, M. et al. More Moore. In 2021 IEEE International Roadmap for Devices and Systems Outbriefs 1–38 (IEEE, 2020).

Liu, Y. et al. Promises and prospects of two-dimensional transistors. Nature 591, 43–53 (2021).

Article  CAS  Google Scholar 

Li, M.-Y., Su, S.-K., Wong, H.-S. P. & Li, L.-J. How 2D semiconductors could extend Moore’s law. Nature 567, 169–170 (2019).

Article  CAS  Google Scholar 

Akinwande, D. et al. Graphene and two-dimensional materials for silicon technology. Nature 573, 507–518 (2019).

Article  CAS  Google Scholar 

Chen, S. et al. Wafer-scale integration of two-dimensional materials in high-density memristive crossbar arrays for artificial neural networks. Nat. Electron. 3, 638–645 (2020).

Article  CAS  Google Scholar 

Liu, C. et al. Two-dimensional materials for next-generation computing technologies. Nat. Nanotechnol. 15, 545–557 (2020).

Article  CAS  Google Scholar 

Rogée, L. et al. Ferroelectricity in untwisted heterobilayers of transition metal dichalcogenides. Science 376, 973–978 (2022).

Article  Google Scholar 

Migliato Marega, G. et al. Logic-in-memory based on an atomically thin semiconductor. Nature 587, 72–77 (2020).

Article  CAS  Google Scholar 

Zhu, K. et al. The development of integrated circuits based on two-dimensional materials. Nat. Electron. 4, 775–785 (2021).

Article  CAS  Google Scholar 

Liu, C. et al. A semi-floating gate memory based on van der Waals heterostructures for quasi-non-volatile applications. Nat. Nanotechnol. 13, 404–410 (2018).

Article  CAS  Google Scholar 

Jiang, J. et al. Rational design of Al₂O₃/2D perovskite heterostructure dielectric for high performance MoS₂ phototransistors. Nat. Commun. 11, 4266 (2020).

Article  CAS  Google Scholar 

Meng, W. et al. Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix. Nat. Nanotechnol. 16, 1231–1236 (2021).

Article  CAS  Google Scholar 

Wu, L. et al. Atomically sharp interface enabled ultrahigh-speed non-volatile memory devices. Nat. Nanotechnol. 16, 882–887 (2021).

Article  CAS  Google Scholar 

Hwangbo, S., Hu, L., Hoang, A. T., Choi, J. Y. & Ahn, J.-H. Wafer-scale monolithic integration of full-colour micro-LED display using MoS₂ transistor. Nat. Nanotechnol. 17, 500–506 (2022).

Article  CAS  Google Scholar 

Li, N. et al. Large-scale flexible and transparent electronics based on monolayer molybdenum disulfide field-effect transistors. Nat. Electron. 3, 711–717 (2020).

Article  CAS  Google Scholar 

Du, Z. et al. Conversion of non-van der Waals solids to 2D transition-metal chalcogenides. Nature 577, 492–496 (2020).

Article  CAS  Google Scholar 

Wang, J. et al. Dual-coupling-guided epitaxial growth of wafer-scale single-crystal WS₂ monolayer on vicinal a-plane sapphire. Nat. Nanotechnol. 17, 33–38 (2022).

Article  CAS  Google Scholar 

Zhou, J. et al. A library of atomically thin metal chalcogenides. Nature 556, 355–359 (2018).

Article  CAS  Google Scholar 

Kang, K. et al. High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity. Nature 520, 656–660 (2015).

Article  CAS  Google Scholar 

Choi, S. H. et al. Large-scale synthesis of graphene and other 2D materials towards industrialization. Nat. Commun. 13, 1484 (2022).

Article  CAS  Google Scholar 

Jiang, J., Parto, K., Cao, W. & Banerjee, K. Ultimate monolithic-3D integration with 2D materials: rationale, prospects, and challenges. IEEE J. Electron Devices Soc. 7, 878–887 (2019).

Article  Google Scholar 

Batude, P. et al. 3D sequential integration: application-driven technological achievements and guidelines. In 2017 IEEE International Electron Devices Meeting (IEDM) 3.1.1–3.1.4 (IEEE, 2017).

Das, S. et al. Transistors based on two-dimensional materials for future integrated circuits. Nat. Electron. 4, 786–799 (2021).

Article  CAS  Google Scholar 

Cao, Y. et al. Unconventional superconductivity in magic-angle graphene superlattices. Nature 556, 43–50 (2018).

Article  CAS  Google Scholar 

Frolov, S. M., Manfra, M. J. & Sau, J. D. Topological superconductivity in hybrid devices. Nat. Phys. 16, 718–724 (2020).

Article  CAS  Google Scholar 

Regan, E. C. et al. Mott and generalized Wigner crystal states in WSe₂/WS₂ moiré superlattices. Nature 579, 359–363 (2020).

Article  CAS  Google Scholar 

Tong, Q. et al. Topological mosaics in moiré superlattices of van der Waals heterobilayers. Nat. Phys. 13, 356–362 (2017).

Article  CAS  Google Scholar 

Zhao, C. et al. Enhanced valley splitting in monolayer WSe₂ due to magnetic exchange field. Nat. Nanotechnol. 12, 757–762 (2017).

Article  CAS  Google Scholar 

Norden, T. et al. Giant valley splitting in monolayer WS₂ by magnetic proximity effect. Nat. Commun. 10, 4163 (2019).

Article  Google Scholar 

Tran, K. et al. Evidence for moiré excitons in van der Waals heterostructures. Nature 567, 71–75 (2019).

Article  CAS  Google Scholar 

Andrei, E. Y. et al. The marvels of moiré materials. Nat. Rev. Mater. 6, 201–206 (2021).

Article  CAS  Google Scholar 

Zhang, K. et al. Visualizing van der Waals epitaxial growth of 2D heterostructures. Adv. Mater. 33, 2105079 (2021).

Article  CAS  Google Scholar 

Niu, L. et al. Van der Waals template-assisted low-temperature epitaxial growth of 2D atomic crystals. Adv. Funct. Mater. 32, 2202580 (2022).

Li, J. et al. General synthesis of two-dimensional van der Waals heterostructure arrays. Nature 579, 368–374 (2020).

Article  CAS  Google Scholar 

Liu, Y., Huang, Y. & Duan, X. Van der Waals integration before and beyond two-dimensional materials. Nature 567, 323–333 (2019).

Article  CAS  Google Scholar 

Bian, M. et al. Dative epitaxy of commensurate monocrystalline covalent van der Waals moiré supercrystal. Adv. Mater. 34, 2200117 (2022).

Article  CAS  Google Scholar 

Yun, S. J. et al. Telluriding monolayer MoS₂ and WS₂ via alkali metal scooter. Nat. Commun. 8, 2163 (2017).

Article  Google Scholar 

Guo, Y. et al. Designing artificial two-dimensional landscapes via atomic-layer substitution. Proc. Natl Acad. Sci. USA 118, e2106124118 (2021).

Article  CAS  Google Scholar