Riber Launches MBE 8000 For Mass Production Of Epiwafers

19 December 2023

Riber S.A. of Bezons, France – which makes molecular beam epitaxy (MBE) systems as well as evaporation sources – has announced final qualification of its MBE 8000 production platform by leading US epiwafer manufacturer.

The MBE 8000 is claimed to deliver twice the productivity of existing products on the market while enabling outstanding performances. The flexibility of MBE technology enables the MBE 8000 to address all compound semiconductor growing markets from vertical-cavity surface-emitting lasers (VCSELs), transistors, sensors requiring a high level of performance in terms of uniformity, reproducibility, and stability.

The system is capable of growing batches of eight 150mm (6-inch) or four 200mm (8-inch) wafers, increasing capacity by 50% over the existing products. As cell design, system geometry and process control are identical, it ensures process transfer within a minimum of time and easy handling for Riber machine operators.

The final qualification step has validated the MBE 8000 in terms of process, robustness, stability, ergonomics, and control. As an example, defect density over 30 runs is less than 50 particles per cm2 measured on a VCSEL-type structure for particles of 0.8–8µm.

See related items:

IntelliEPI and Riber MBE 8000 joint development program shows high thickness and doping uniformities across 8×6” or 4×8” wafer runs

Riber delivers first MBE 8000 system

Tags: Riber

Visit: www.riber.com/product/mbe-8000