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Tag:
area-selective deposition
Site-Specific Compositional Info from Periodic Nanostructures Obtained Using Rutherford Backscattering Spectrometry
Semiconductor
October 28, 2022
A new technical paper titled “Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry” was published by researchers at IMEC and KU...
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Semiconductor
March 17, 2022
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